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Determination of elastic modulus of thin layer - numerical study of microcompressive test and the bulge test
Petráčková, Klára ; Pokorný, Pavel (referee) ; Náhlík, Luboš (advisor)
Determination of mechanical properties of very thin films is rather difficult task as all of currently using testing techniques have some weakness. This master’s thesis deals with microcompressive test and bulge test. Finite element simulations of the two methods were carried out in order to better understanding of experimental record. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared from Al film deposited on Si substrate using FIB. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using FE modeling is suggested in the thesis. Second part of the work is focused on modeling of bulge test. Pressure is applied on freestanding SiNx film while deflection of the film is measured. Stress state in the film is biaxial making determination of mechanical properties of the film more complicated. The goal is to present how to model the whole problem. In addition, preparation of the specimens was simulated to estimate residual stress in the film. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
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Compressive testing of pillars: numerical study
Petráčková, Klára ; Zouhar, Michal (referee) ; Náhlík, Luboš (advisor)
Determination of mechanical properties of thin films, which are used e.g. in electronics, is not simple due to the required very sophisticated equipments. Also the interpretation of results is rather difficult. This bachelor’s thesis is focused on determination of important factors which affect the microcompressive testing results. For microcompressive testing, the pillars made from studied thin film attached by the bottom to a substrate are used. There can be another thin interlayer between studied film and the substrate. The pillar is made by focused ion beam (FIB). Pillar is loaded by a nanoindenter with flat tip while the deformation response is measured. The goal of the thesis is numerical simulation (using the Finite Element Method) of the microcompressive testing and determination of individual specific geometric factors of tested pillars on Young’s modulus of the thin film. Data from microcompressive testing of aluminium thin film attached to silicon substrate with tungsten interlayer were available for numerical simulation. We have estimated influence of specific pillar geometry on data using compressive testing and improved evaluation of Young’s modulus. We have presented a recommendation for more accurate evaluation of Young’s modulus determined from experimental data involving inaccuracy following the pillar shape. The results and methods presented in this thesis can be useful in future development of compressive testing technique for determination of mechanical properties of metal thin films.
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Determination of elastic modulus of thin layer - numerical study of microcompressive test and the bulge test
Petráčková, Klára ; Pokorný, Pavel (referee) ; Náhlík, Luboš (advisor)
Determination of mechanical properties of very thin films is rather difficult task as all of currently using testing techniques have some weakness. This master’s thesis deals with microcompressive test and bulge test. Finite element simulations of the two methods were carried out in order to better understanding of experimental record. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared from Al film deposited on Si substrate using FIB. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using FE modeling is suggested in the thesis. Second part of the work is focused on modeling of bulge test. Pressure is applied on freestanding SiNx film while deflection of the film is measured. Stress state in the film is biaxial making determination of mechanical properties of the film more complicated. The goal is to present how to model the whole problem. In addition, preparation of the specimens was simulated to estimate residual stress in the film. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
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Compressive testing of pillars: numerical study
Petráčková, Klára ; Zouhar, Michal (referee) ; Náhlík, Luboš (advisor)
Determination of mechanical properties of thin films, which are used e.g. in electronics, is not simple due to the required very sophisticated equipments. Also the interpretation of results is rather difficult. This bachelor’s thesis is focused on determination of important factors which affect the microcompressive testing results. For microcompressive testing, the pillars made from studied thin film attached by the bottom to a substrate are used. There can be another thin interlayer between studied film and the substrate. The pillar is made by focused ion beam (FIB). Pillar is loaded by a nanoindenter with flat tip while the deformation response is measured. The goal of the thesis is numerical simulation (using the Finite Element Method) of the microcompressive testing and determination of individual specific geometric factors of tested pillars on Young’s modulus of the thin film. Data from microcompressive testing of aluminium thin film attached to silicon substrate with tungsten interlayer were available for numerical simulation. We have estimated influence of specific pillar geometry on data using compressive testing and improved evaluation of Young’s modulus. We have presented a recommendation for more accurate evaluation of Young’s modulus determined from experimental data involving inaccuracy following the pillar shape. The results and methods presented in this thesis can be useful in future development of compressive testing technique for determination of mechanical properties of metal thin films.
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